Carmanhaas Maprors kapena owonetsera kwathunthu amagwiritsidwa ntchito m'matumbo a laser monga owonerera kumbuyo ndikuwonetsa magalasi, komanso kunja kwa mtengo woyandama mu njira zoperekera mitengo.
Silicon ndiye gawo lochulukirapo lomwe limagwiritsidwa ntchito kwambiri; Ubwino wake ndi mtengo wotsika, kulimba kwabwino, komanso kukhazikika kwamafuta.
Molybdenum Galasi yolimba kwambiri imapangitsa kuti zikhale zabwino kwa malo ofunikira kwambiri. Mooli kaliolo nthawi zambiri amaperekedwa osavomerezeka.
| Kulembana | Miyezo |
| Kulekerera kosatheka | +0.000 "/ -0.005" |
| Kuleza Mtima | ± 0.010 " |
| Pallellelism: (Plano) | Mphindi 3 arc |
| Zowoneka bwino (wopukutidwa) | 90% ya mainchesi |
| Pamwamba chithunzi @ 0.63um | Mphamvu: 2 fringes, kusagwirizana: 1 fringe |
| Kukumba | 10-25 |
| Dzina lazogulitsa | Mainchesi (mm) | Et (mm) | Chokutila |
| Moolima | 30 | 3/6 | Palibe chophimba, AOI: 45 ° |
| 50.8 | 5.08 | ||
| Silicon galasi | 30 | 3/4 | Hr @ 106um, aoi: 45 ° |
| 38.1 | 4/8 | ||
| 50.8 | 9.525 |
